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Merging parallel-plate and levitation actuators to enable linearity and tunability in electrostatic MEMS

Overview of attention for article published in Journal of Applied Physics, July 2019
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About this Attention Score

  • In the top 25% of all research outputs scored by Altmetric
  • High Attention Score compared to outputs of the same age (88th percentile)
  • High Attention Score compared to outputs of the same age and source (96th percentile)

Mentioned by

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3 news outlets

Citations

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4 Dimensions

Readers on

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7 Mendeley