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Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

Overview of attention for article published in Journal of Applied Physics, June 2005
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About this Attention Score

  • In the top 25% of all research outputs scored by Altmetric
  • High Attention Score compared to outputs of the same age (95th percentile)
  • High Attention Score compared to outputs of the same age and source (98th percentile)

Mentioned by

twitter
16 X users
patent
6 patents
wikipedia
8 Wikipedia pages

Citations

dimensions_citation
2236 Dimensions

Readers on

mendeley
1694 Mendeley
citeulike
2 CiteULike
Summary X Patents Wikipedia Dimensions citations
So far, Altmetric has seen 6 patents that reference this research output.

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